Scanning electron microscope, EVO-18, Karl Zeiss, Germany. It is mainly used in new materials, physics, chemistry, biology, medicine and other fields to test the surface morphology and microstructure of various materials. Resolution: High vacuum secondary electron image < 3.0nm (30kV); Low vacuum backscattered electron image < 4.0nm (30kV). It is composed of vacuum system, electron optical system, secondary electron detector, backscatter electron detector and other components. Secondary electron image and backscatter electron image can be observed.